Advanced Process Systems
   Advanced Process Systems, Inc
MECO EQUIPMENT ENGINEERS              GNP TECHNOLOGY              SRI INTERNATIONAL
 
 
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Meco Equipment Engineers

Electrodeposition of Photoresist Wafer Coater

Meco ED Photoresist Coater is an enabling technology for applying uniform resist layers
 needed for accurate pattern transfer on 3-D structures and feature rich topography
 applications like MEMS and advanced packaging.

         Meco works in partnership with SRI International for demos and samples

 

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Intelligent Chemical Mechanical Planarization

 

Dual Head Chemical Mechanical Planarization with Friction Force Statistical Process 

Control for 4”, 6”, &  8” Wafers and R&D Coupons. GnP Technology works in partnership

 with Berkeley University Mechanical Engineering dept for demos and samples.

 

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Friction Force Monitoring System

 

For in-situ Chemical Mechanical Planarization process Analysis.

Advanced R&D Development from basic CMP to Nano level CMP

Quick Analysis of Metals and Metal Layer Selection

 

 

 

 

 

                                                                                                                             

Advanced Process Systems is committed to providing next generation manufacturing equipment for product development 

through  full  production  in  the  semiconductor development  areas of  MEMS, WLP, MCM,  3-D development, compound 

semiconductor and many diverse areas of advanced packaging.  Representing cost effective equipment for R&D through  

production in the manufacturing areas of post (CMP) Wafer Cleaner Systems,  Chemical Mechanical Planarization (CMP), 

Electroless Under Bump Metallization (Electroless UBM)   and  Electro-deposition of Photoresist  (ED Photo resist Coater). 

Our 3rd generation ED Photo resist Wafer Coaters for Electrodeposition of Photoresist  is an enabling technology for 3D  

   advanced packaging  applications and  next generation development. Our R&D Contract Fab  for MEMS, optoelectronics,                                                                    

      and 3-D advanced packaging development provides the most multi-disciplinary staff of scientist, engineers and physicist 

      of any R&D contract Fab in the United States.

 

       Home Page    Equipment & Manufacture Links    R&D Equipment    R&D Contract Fab    Process Papers     About Us    Contact Us

 

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